Home > IC Fab Solutions
Product Type Function
Product Name
Configurations
Wafer SorterCrossing Spartan™ 300 Sorter
  • Wafer Size: 300mm
  • Options: 4 I/O, Sorter Integrated Stocker (SIS)
Wafer SorterCrossing Spartan™ 450 Sorter
  • Wafer Size: 450mm
  • Options: 4 I/O, Sorter Integrated Stocker (SIS)
Product Type Function
Product Name
Configurations
Reticle Handling and Management ProductsCrossing Narrow Reticle Indexer
  • Used in combination with SMIF-Pods and SMIF-E inert gas purge system
Loadport - SMIF Pod Opener/Open Cassette TransferCrossing SMIF Loadport Transfer (LPT) I/O
  • 200mm (Open Cassette)
  • SMIF LPT Tr: rotational head designed for non-perpendicular cassette placement
  • SMIF LPT Tx: lateral cassette motion to address narrow cassette-to-cassette spacing
  • SMIF LPT Ty: offset arm to accommodate narrow chamber openings
SMIF Cassette Indexing Crossing SMIF-INX Indexers
  • 200mm
  • Designed for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafers
Loadport (SMIF-Compatible)Crossing VersaPort™ 2200 SMIF-Compatible Loadport
  • 200mm
  • Open cassette I/O processing available with Manual Open Cassette Adapter (MOCA) option
Product Type Function
Product Name
Configurations
Near-tool FOUP Buffering SystemCrossing DARTS™ FOUP BufferModules:
  • 6, 10-FOUP Carousel
  • Shuttle Lift
  • Passive Ports, Active Ports
Available for floor or ceiling mount
Product Type Function
Product Name
Configurations
Radio Frequency (RF) IDCrossing Advan Tag™ 9100 and 9800 family
  • Single or multiplexed reader
Infrared IDCrossing Smart Tag 8200 and 8400 familyN/A

Crossing Automation offers IC fab manufacturers a complete family of wafer handling solutions, from wafer sorters, loadports, indexers, FOUP buffers and asset tracking products.