Crossing Automation Extends 200 mm Semiconductor Fab Life; New Line of SMIF Loadports Drive Performance and Cleanliness
New Line of SMIF Loadports Drive Performance and Cleanliness
Shanghai, China – March 15, 2011 – Today at industry tradeshow SEMICON China, Crossing Automation, Inc. (http://www.crossinginc.com), a leading supplier of efficient, cost-effective automation solutions and engineering services, introduced a new line of adaptive standard mechanical interface (SMIF) loadport (LPT) solutions for open cassette 200 mm process, metrology and inspection tools. The new adaptive SMIF-LPT solutions offer cost-effective upgrades of non-SMIF tools to SMIF, thereby enabling the conversion of existing 200 mm facilities for semiconductor manufacturing at technology nodes below 180 nm.
“Given the compelling capital investment cost advantage for 200 mm equipment, many manufacturers are looking to take advantage of SMIF for their tool sets,” said May Su, vice president of product marketing for Crossing Automation. “These new options allow SMIF to be added to open cassette tools and bring the benefits of SMIF to a broad array of 200 mm equipment.”
The three new configurations are designed to address original equipment manufacturer (OEM) tool configurations with difficult cassette landing stages. The new SMIF-LPT Tr is a rotational head designed for non-perpendicular cassette placement. The SMIF-LPT Tx offers a lateral cassette motion to address narrow cassette-to-cassette spacing, while the SMIF-LPT Ty has an offset arm to accommodate narrow chamber openings. These new features can also be combined or upgraded on an existing SMIF-LPT. All of the adaptive SMIF solutions deliver improved particle performance to achieve Class 1 particle performance in a Class 100 clean room environment.
“This new line of products is truly reflective of our goal to continually deliver added value to our customers and markets served. With over 12,000 units shipped, Crossing Automation is the demonstrated leader in delivering proven loadport technology and its associated value to semiconductor manufacturers worldwide,” added Su.
To learn more about Crossing Automation’s new adaptive SMIF products and full range of automation solutions please visit SEMICON China, Booth 1553, Hall W-1 in the Shanghai New International Expo Centre in Shanghai, China from March 15 to 17, 2011. Alternatively, please visit http://www.crossinginc.com.
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