Home > OEM Equipment Solutions
Product Type Function
Product Name
Configurations
EFEM (Equipment Front-End Module)Crossing Spartan™ EFEMs
  • Wafer size options: 200mm, 300mm, 200/300mm combined
  • Portal options: 2 I/O, 3 I/O, 4 I/O
450mm Development Platform New!Crossing Spartan™ 450mm Development Platform (Spartan 450-DP)
  • 450mm
Vacuum Transfer ModuleCrossingConnect™ Vacuum Transfer (VT) Module
  • 150mm/200mm/300mm
  • Can be configured as 2, 3 or 4-sided
Dual-wafer Load-LockCrossingConnect™ Load-Lock (LL)
  • 150mm/200mm/300mm
Vacuum Cassette Elevator CrossingConnect™ Vacuum Cassette Elevator (VCE)
  • 150mm/200mm (25 wafer)
  • 300mm (13 wafer)
Vacuum Platform System ControllerCrossingConnect™ Equipment ControllerN/A
Product Type Function
Product Name
Configurations
Loadport Crossing Falcon™ Loadport
  • 300mm (FOUP)
Loadport New!Crossing Certon™ 450 Loadport
  • 450mm (MAC Compliant)
LoadportCrossing IsoPort
  • 150mm/200mm (Open Cassette)
Loadport (SMIF-compatible)Crossing VersaPort™ 2200 SMIF Loadport
  • 200mm
  • Open cassette I/O processing available with Manual Open Cassette Adapter (MOCA) option
Loadport – SMIF Pod Opener/Open Cassette TransferCrossing SMIF Loadport Transfer (LPT) I/O
  • 200mm (Open Cassette)
  • SMIF LPT Tr: rotational head designed for non-perpendicular cassette placement
  • SMIF LPT Tx: lateral cassette motion to address narrow cassette-to-cassette spacing
  • SMIF LPT Ty: offset arm to accommodate narrow chamber openings
FOUP Management Buffer
Crossing DARTS™ FOUP BufferModules:
  • 6, 10-FOUP Carousel
  • Shuttle Lift
  • Passive Ports, Active Ports
Available for floor or ceiling mounts
SMIF Cassette Indexing Crossing SMIF-INX Indexers
  • 200mm
  • Designed for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafers
Reticle Handling and Management ProductsCrossing Narrow Reticle Indexer
  • Used in combination with SMIF-Pods and SMIF-E inert gas purge system
Product Type Function
Product Name
Configurations
Radio Frequency (RF) IDCrossing Advan Tag™ 9100 and 9800 FamilySingle or multiplexed reader
Infrared IDCrossing Smart Tag 8200 and 8400 Family
Services
Service Provider
Configurations
System Control Software AltaStreamN/A
Tool Automation SoftwarePeer GroupN/A

Crossing Automation offers OEM fab tool companies a complete family of modular solutions from EFEM wafer handling products, to robots, vacuum products, loadports, indexers, FOUP buffers and asset tracking products.