Crossing Automation’s new, on-tool buffer: DARTS ( Dynamic Access Recirculating Transportand Storage ) represents a new generation of flexible, near-tool buffering devices. Some of its benefits include:

• Significant increase in tool utilization (up to 30%) resulting in higher ROI of process tool
• Reduces AMHS traffic and eliminates OHT congestion in high throughput bays
• Eliminates OHT delivery variability and tool “starvation”
• Retrofit solution for existing fabs

The Crossing DARTS FOUP Buffer utilizes the space under the ceiling and can be mounted in a cleanroom aisle or on top of a process tool. The storage capacity can be configured to meet customer requirements.

The close proximity to the process tool reduces AMHS traffic and eliminates congestion in high throughput bays. The Crossing DARTS buffer interacts with an OHT system via the E84 interface. To minimize the integration effort with the MES, DARTS is equipped with an E88 compliant software interface. The Crossing DARTS buffer can either be used as a mini-stocker device where the AMHS is transferring FOUPs in and out or it can be equipped with a shuttle lift, allowing our DARTS buffer to transfer FOUPs directly to loadports independent of the AMHS.

Deploying the Crossing DARTS buffer can significantly reduce tool starvation in high throughput areas. A tool is considered to be in a “starved state” when the AMHS cannot deliver material fast enough. As a result, the tool is sitting idle. The DARTS buffer compensates for AMHS variability and increases the overall tool utilization without the need for additional loadports.

For further information please contact your regional sales office.