Crossing Automation’s Dynamic Access Recirculating Transport and Storage (DARTS) FOUP Buffer represents a new generation of flexible, near-tool buffering devices. Some of its benefits include:

• Enables OEM’s to maintain small tool footprint on high thru-put tools
• Alternative solution to larger EFEM with additional loadports
• Configurable storage capacity according to OEM requirements
• Cost efficient solution for empty FOUP management

The Crossing DARTS FOUP Buffer utilizes the space under the ceiling and can be mounted in a cleanroom aisle or on top of a process tool. The OEM has full control over the DARTS buffer system via .Net interface.

The modular design allows to configure the storage capacity to meet customer requirements. Depending on the application DARTS can be equipped with Static ports, Active ports and/or carousel storage. DARTS comes with an integrated carrier transfer mechanism (Shuttle lift). The Shuttle-lift has a configurable x-axis and a hoist mechanism with gripper, allowing to transfer wafer carriers directly from/to the tool loadports without the need of an OHT vehicle. DARTS interacts with an OHT system via the E84 interface.

The Crossing DARTS FOUP buffer can be retrofitted in existing fabs. Deploying the buffer can significantly increase tool utilization in high throughput areas.

For further information please contact your regional sales office.