Overview
The new Crossing Spartan™ 450mm development platform brings to market a unique, small footprint, low-cost system that allows original equipment manufacturers (OEMs) to reliably get wafers into and out of process chambers. This single FOUP EFEM accelerates OEMs 450mm development efforts by eliminating the need to spend engineering time on platform development. This highly scalable platform allows OEMs to easily migrate to high volume production, with no software and hardware interface changes.

Highlights

Combines production-proven 300mm components with the Crossing 450mm Certon™ Loadport

Scale-up of Crossing Spartan™ EFEM Wafer EngineIntegrated loadport

Optional pre-aligner

Small footprint
Width: 1.4m

Depth: 1.4m
To obtain more information on this product contact your regional sales office.