CrossingConnect™ Load-Lock (LL)
The dual-wafer CrossingConnect™ Load-Lock (LL) is specifically designed for high-speed pump and vent cycles. As the name implies, it holds two wafers at a time. Like all CrossingConnect wafer transfer modules, the CrossingConnect™ LL is a self-contained vacuum system. Meeting industry standards, pump and vent cycle performance delivers more than 120 WPH.
In addition to being a single unit, the CrossingConnect™ LL can be used in conjunction with a two-sided CrossingConnect Vacuum Transfer, or two LL’s with a three-sided CrossingConnect Vacuum Transfer to create a dual Load-Lock.
