CrossingConnect™ Vacuum Cassette Elevator (VCE)
The CrossingConnectTM Vacuum Cassette Elevator (VCE) is a compact, ultra-clean load lock for 200 and 300mm wafers. It consists of a vacuum chamber with a magnetically coupled elevator system.
When interfaced to the CrossingConnect Vacuum Transfer module, it is a cost effective way to deliver wafers from a cassette into and out of a process chamber without breaking vacuum. The compact size and low cost VCE/VT platform also make it ideal for R&D and pilot production.
Key Features:
- Capacity – one 13 wafer 300mm cassette or one 25 wafer 200mm cassette
- Base pressure 10-3, high vacuum compatible
- Chamber purge cycles to reduce particulates
- Magnetically coupled elevator system
- Manual door with viewports and interlock to prevent operator exposure to high temperature wafers
- Wafer mapping including cross slot, double slot or missing wafer detection
- Cassette presence and placement sensor
- CE/S2/S8 compliant