As the backbone of the CrossingConnect™ product line, the Vacuum Transfer (VT) performs wafer transfer functions for all high-level system solutions. The VT is a compact vacuum system containing two linear extensions and a combined Z and Theta drive assembly. The VT is fully self-contained, providing all required functions such as pump, vent and control of transfer pressure gases.

The VT can be configured as a two-, three- or four-sided module. This enables easy connection to other modules in the CrossingConnect product line, which includes a dual-wafer load lock and vacuum cassette elevator.

Technically, the VT’s performance is superior to conventional robotics in key performance parameters such as repeatability, “Swap Time” or wafer exchange time and power consumption, using on average less power than a 130W light bulb. The VT articulated extension design offers another attractive feature — its compact size.