Summary:
Advanced Inquiry Systems, Inc., (AISI) selected Crossing Automation's CrossingDesign Services engineering services to develop a new automated handling platform for AISI's advanced, full wafer, back-end of line test technology.

Objective:
Develop an automation platform that could serve multiple applications in the test arena. The end product needed to have many of the characteristics of a common cluster tool as well as being modular, expandable, and reliable -- out of the box.

Implementation:
To meet these objectives, we followed the basic tenets of CrossingDesign Services: reuse and reconfiguration of standard, proven, off-the-shelf modules. For this project, we selected the SPARTAN™ EFEM as the backbone of the product and the Wafer Engine™ as the secondary wafer handling module. To meet the unique precision alignment and assembly requirements, we turned to an outside supplier of precision stages for a standard off-the-shelf assembly. Having assembled the bulk of the system out of off-the-shelf components, we then set about working with AISI to develop the process-specific technologies (and associated modules) required to enable their advanced test technology.

Results:
This project is representative of the essence and power of CrossingDesign Services: a cooperative development project designed to shorten time to market, lower development costs, and most importantly deliver application-specific product solutions that are based on providing minimal new subsystem content through Reuse & Reconfiguration.